A planar asymmetric Schottky barrier source/drain structure for nano-scale MOSFETs

Semiconductor Science and Technology

Volumn 21, Issue 5, 2006, Pages 608-611

  Sun, Lei ^a   Li, Ding Yu ^a   Zhang, Sheng Dong ^a   Liu, Xiao Yan ^a   Wang, Yi ^a   Han, Ru Qi ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DATA ACQUISITION; LEAKAGE CURRENTS; MOSFET DEVICES; PLATINUM COMPOUNDS;

ASYMMETRIC SCHOTTKY BARRIER SOURCE/DRAIN MOSFET (ASB); NUMERICAL SIMULATOR; THE SPACER TECHNIQUE;

SCHOTTKY BARRIER DIODES;

EID: 33645658321     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/5/007     Document Type: Article

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