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Volumn 43, Issue 2, 2006, Pages

Characterization of detectors for extreme UV radiation

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; DIAMONDS; OPTIMIZATION; PHOTODIODES; SYNCHROTRON RADIATION; ULTRAVIOLET DEVICES;

EID: 33645514648     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/43/2/S02     Document Type: Conference Paper
Times cited : (44)

References (17)
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    • Synchrotron-radiation operated cryogenic electrical-substitution radiometer as high-accuracy primary detector standard in the ultraviolet, vacuum ultraviolet and soft x-ray spectral ranges
    • 0003-6935
    • Rabus H, Persch V and Ulm G 1997 Synchrotron-radiation operated cryogenic electrical-substitution radiometer as high-accuracy primary detector standard in the ultraviolet, vacuum ultraviolet and soft x-ray spectral ranges Appl. Opt. 36 5421-40
    • (1997) Appl. Opt. , vol.36 , Issue.22 , pp. 5421-5440
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  • 2
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    • The PTB high-accuracy spectral responsivity scale in the VUV and x-ray range
    • 0026-1394 S25
    • Gottwald A, Kroth U, Krumrey M, Richter M, Scholze F and Ulm G 2006 The PTB high-accuracy spectral responsivity scale in the VUV and x-ray range Metrologia 43 S125-9
    • (2006) Metrologia , vol.43 , Issue.2
    • Gottwald, A.1    Kroth, U.2    Krumrey, M.3    Richter, M.4    Scholze, F.5    Ulm, G.6
  • 4
    • 0037226007 scopus 로고    scopus 로고
    • High-accuracy radiometry in the EUV range at the PTB soft x-ray radiometry beamline
    • 0026-1394 352
    • Scholze F, Tümmler J and Ulm G 2003 High-accuracy radiometry in the EUV range at the PTB soft x-ray radiometry beamline Metrologia 40 S224-8
    • (2003) Metrologia , vol.40 , Issue.1
    • Scholze, F.1    Tümmler, J.2    Ulm, G.3
  • 6
    • 0000402028 scopus 로고
    • Quantum efficiency stability of silicon photodiodes
    • 0003-6935
    • Korde R and Geist J 1987 Quantum efficiency stability of silicon photodiodes Appl. Opt. 26 5284-90
    • (1987) Appl. Opt. , vol.26 , Issue.24 , pp. 5284-5290
    • Korde, R.1    Geist, J.2
  • 9
    • 3843051247 scopus 로고    scopus 로고
    • Metrology tools for EUV-source characterization and optimization
    • 10.1117/12.556521 0277-786X
    • Mialla T et al 2004 Metrology tools for EUV-source characterization and optimization Proc. SPIE 5374 979-90
    • (2004) Proc. SPIE , vol.5374 , pp. 979-990
    • Mialla, T.1    Al, E.2
  • 10
    • 0000317312 scopus 로고    scopus 로고
    • Spectral responsivity of silicon photodiodes: High-accuracy measurement and improved self-calibration in the soft x-ray spectral range
    • 10.1117/12.256027 0277-786X
    • Scholze F, Rabus H and Ulm G 1996 Spectral responsivity of silicon photodiodes: high-accuracy measurement and improved self-calibration in the soft x-ray spectral range Proc. SPIE 2808 534-43
    • (1996) Proc. SPIE , vol.2808 , pp. 534-543
    • Scholze, F.1    Rabus, H.2    Ulm, G.3
  • 12
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    • Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation
    • 0003-6935
    • Scholze F, Klein R and Bock T 2003 Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation Appl. Opt. 42 5621-6
    • (2003) Appl. Opt. , vol.42 , Issue.28 , pp. 5621-5626
    • Scholze, F.1    Klein, R.2    Bock, T.3
  • 13
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    • Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV
    • 10.1063/1.368398 0021-8979
    • Scholze F, Rabus H and Ulm G 1998 Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV J. Appl. Phys. 84 2926-39
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    • Scholze, F.1    Rabus, H.2    Ulm, G.3
  • 14
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    • Linearity of silicon photodiodes for EUV radiation
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    • Scholze F, Klein R and Müller R 2004 Linearity of silicon photodiodes for EUV radiation Proc. SPIE 5374 926-34
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  • 15
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    • Absolute calibration of a multilayer-based XUV diagnostic
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  • 17
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    • Extreme-ultraviolet source development: A comparison of different concepts
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    • Schriever G et al 2000 Extreme-ultraviolet source development: a comparison of different concepts Proc. SPIE 4146 113-20
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.