Linearity of silicon photodiodes for EUV radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 2, 2004, Pages 926-934

  Scholze, Frank ^a   Klein, Roman ^a   Müller, Ralph ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Detector calibration; Detector linearity; EUV; Photodiode responsivity

Indexed keywords

CALIBRATION; CRYOGENICS; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; PHOTODIODES; PHOTONS; RADIOMETERS; SILICON; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION;

DETECTOR CALIBRATION; DETECTOR LINEARITY; EUV; PHOTODIODE RESPONSIVITY;

LITHOGRAPHY;

EID: 3843138307     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.532151     Document Type: Conference Paper

References (13)

1. F. Scholze, B. Beckhoff, G.Brandt, R. Fliegauf, R. Klein, B. Meyer, D. Rost, D. Schmitz, and M. Veldkamp, J. Weser, G. Ulm, E. Louis, A. Yakshin, P. Goerts, S. Oestreich, F. Bijkerk, "The new PTB-beamlines for high-accuracy EUV reflectometry at BESSY II," Proc. SPIE 4146, 72-82 (2000)
2. F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, A. Gottwald, R. Klein, B. Meyer, U. Schwarz, R. Thornagel, J. Tümmler, K. Vogel, J. Weser, and G. Ulm, "High-Accuracy EUV Metrology of PTB Using Synchrotron Radiation," Proc. SPIE 4344, 402-413 (2001)
3. G. Ulm, B. Beckhoff, R. Klein, M. Krumrey, H. Rabus, and R. Thornagel, "The PTB radiometry laboratory at the BESSY II electron storage ring," Proc. SPIE 3444, 610-621 (1998)
4. H. Rabus, V. Persch, and G. Ulm, "Synchrotron-Radiation Operated Cryogenic Electrical-Substitution Radiometer as High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum Ultraviolet and Soft X-Ray Spectral Ranges," Appl. Opt. 36, 5421-5440 (1997)
5. F. Scholze, H. Rabus, G. Ulm, "Spectral responsivity of silicon photodiodes: High-accuracy measurements and improved self calibration in the soft X-ray spectral range," Proc. SPIE 2808, 534-543 (1996)
6. F. Scholze, J. Tümmler, G. Ulm, "High-accuracy radiometry in the EUV range at the PTB soft X-ray radiometry beamline," Metrologia 40, S224-S228 (2003)
7. F. Scholze, G. Brandt, P. Müller, B. Meyer, F. Scholz, J. Tümmler, K. Vogel, and G. Ulm, "High-accuracy detector calibration for EUV metrology at PTB," Proc. SPIE 4688, 680-689 (2002)
8. E.M. Gullikson, R. Korde, L.R. Canfield, and R.E. Vest, "Stable silicon photodiodes for absolute intensity measurements in the VUV and soft X-ray regions," J. Electron Spectrosc. Rel. Phenom. 80, 313-316 (1996)
9. R. Korde, J.S. Cable, and L.R. Canfield, "One gigarad passivating nitrided oxides for 100% internal quantum efficiency silicon photodiodes," IEEE Trans. Nucl. Sci. 40, 1655-1659 (1993)
10. R. Korde, C. Prince, D. Dunningham, R. Vest, E. Gullikson, "Present status of radiometric quality silicon photodiodes," Metrologia 40, 145-149 (2003)
11. F. Scholze, R. Klein, T. Bock, "Irradiation Stability of Silicon Photodiodes for Extreme-Ultraviolet Radiation," Appl. Opt. 42, 5621-5626 (2003)
12. A. Gottwald, R. Müller, M. Richter, A. Sorokin, and G. Ulm, "Pulse energy measurement of extreme ultraviolet undulator radiation," Meas. Sci. Technol. 15, 437-443 (2004)
13. nd edition, John Wiley & Sons, Inc. New York, Chichester, Brisbane, Toronto, Signapore, p. 32, ISBN 0-471-05661-8