Vertical nanopatterning of 6H-SiC(0001) surfaces using gold-metal nanotube membrane lithography

Applied Physics A: Materials Science and Processing

Volumn 83, Issue 3, 2006, Pages 361-363

  Lee, W ^a   Moyen, E ^b   Wulfhekel, W ^a   Leycuras, A ^c   Nielsch, K ^a   Gosele U ^a   Hanbucken M ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b AIX MARSEILLE UNIVERSITÉ   (France)

^c CRHEA CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; LITHOGRAPHY; MORPHOLOGY; NANOTUBES; REACTIVE ION ETCHING; SILICON CARBIDE;

ETCH PITS; NANOPATTERNING; NANOTUBE MEMBRANE LITHOGRAPHY; WELL-RESOLVED PROTRUSIONS;

NANOTECHNOLOGY;

EID: 33645357785     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3566-4     Document Type: Article

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