High-speed optical nanofabrication by platinum oxide nano-explosion

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 4, 2006, Pages

  Kurihara, Kazuma ^a   Yamakawa, Yuzo ^a   Nakano, Takashi ^a   Tominaga, Junji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Lithography; Nanostructure; Platinum oxide; Thermal decomposition

Indexed keywords

NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY; PLATINUM; PYROLYSIS; THERMODYNAMICS;

HIGH-ASPECT-RATIO STRUCTURE; NANOSTRUCTURE; OPTICAL NANOFABRICATION; PLATINUM OXIDE;

OPTICAL ENGINEERING;

EID: 33645345132     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/4/S13     Document Type: Article

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