Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

Optics Letters

Volumn 23, Issue 20, 1998, Pages 1627-1629

  Lopez, A G ^a   Craighead, H G ^a  

^a Department of Materials Science and Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; LEAST SQUARES APPROXIMATIONS; LIGHT POLARIZATION; MULTILAYERS; NUMERICAL ANALYSIS; OPTICAL VARIABLES MEASUREMENT; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; WAVEFORM ANALYSIS;

DIRECT WRITE ELECTRON BEAM LITHOGRAPHY; MULTILAYER GRATING; WAVE PLATE POLARIZING BEAM SPLITTER;

OPTICAL BEAM SPLITTERS;

EID: 0032531547     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.23.001627     Document Type: Article

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