Use of the quartz crystal microbalance to measure the mass of submonolayer deposits: Measuring the stoichiometry of surface oxides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1857-1862

  Narine, S S ^a   Slavin, A J ^a  

^a TRENT UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE MEASUREMENTS; ANTIMONY ATOMS; ATOMIC MASS; COMPLETE OXIDATION; DEPOSITED FILMS; EX SITU; FREQUENCY SHIFT; GOLD ELECTRODES; HIGH RESOLUTION; INDUCTIVELY-COUPLED; LOW PRESSURES; MASS SENSITIVITY; METAL FILM; METAL OXIDES; MICROBALANCES; OXYGEN ATOM; OXYGEN GAS; PLASMA MASS SPECTROMETERS; POLYCRYSTALLINE GOLD; QUARTZ CRYSTAL; REPRODUCIBILITIES; SUBMONOLAYER; SURFACE OXIDE; ULTRA-THIN; ULTRA-THIN OXIDE FILMS; VALENCIES;

ANTIMONY; ATOMS; DEPOSITS; FREQUENCY SHIFT KEYING; GOLD DEPOSITS; MASS SPECTROMETRY; MONOLAYERS; OXIDE MINERALS; OXYGEN; PIEZOELECTRIC DEVICES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; STOICHIOMETRY; ULTRATHIN FILMS; VACUUM;

OXIDE FILMS;

EID: 22044438245     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581118     Document Type: Article

References (28)

1. L. Rodriguez, W. N. Lennard, H. Xia, and G. R. Massoumi, Appl. Surf. Sci. 103, 289 (1996).
2. L. C. Feldman and J. W. Mayer, Fundamentals of Surface and Thin Film Analysis (North-Holland, New York, 1986).
3. T. A, Carlson, Photoelectron and Auger Spectroscopy (Plenum, New York, 1975).
4. A. J. Bevolo, J. D. Verhoeven, and M. Noak, Surf. Sci. 134, 499 (1983).
5. R. A. Powell, Appl. Surf. Sci, 2, 397 (1979).
6. G. Z. Sauerbrey, Physik Verhandl. 8, 1.13 (1957).
7. S. Chen, B. Wu, and C. Cha, J. Electroanal. Chem. 420, 111 (1997).
8. M. S. Zei, Y. Nakai, G. Lehmpfuhl, and D. M. KoIb, J. Electroanal. Chem. 150, 201 (1983).
9. C. E. D. Chidsay, D. N. Loiacono, T. Sleator, and S. Nakahara, Surf. Sci, 200, 45 (1988).
10. K. Uosaki, S. Ye, and T. J. Kondo, J. Phys. Chem. 99, 14117 (1995).
11. H. Lei, H. Uchida, and M. Watanabe, J. Electroanalytical. Chem. 413, 131 (1996).
12. K. Uosaki, S. Ye, Y. Oda, T. Haba, and K. Hainada, Langmuir 13, 594 (1997).
13. L. L. Levenson, in Applications of Piezoelectric Quartz Crystal Microbalances, edited by C. Lu and A. W. Czanderna (Elsevier, Amsterdam, 1984), pp. 198-219.
14. C. Lu, in Applications of Piezoelectric Quartz Crystal Microbalances, edited by C. Lu and A. W. Czanderna (Elsevier, Amsterdam, 1984), pp. 23-24.
15. H. K. PuUcer and J. P. Decosterd, in Applications of Piezoelectric Quartz Crystal. Microbalances, edited by C. Lu and A. W. Czanderna (Elsevier, Amsterdam, 1984), p. 70.
16. P. Ma and A. J. Slavin, J. Vac. Sci. Technol. A 11, 8340 (1994).
17. J. G. MacMillan-Jones, F. A. Londry, and A. J. Slavin, Surf. Sci. 186, 357 (1987).
18. B. Kasemo and E. Tornqvist, Surf. Sci. 77, 209 (1978).
19. A. Fozzo (private communication).
20. P. J. Cumpson and M. P. Seah, Meas. Sci, Technol. 1, 544 (1990).
21. F. Boersma and F. J. Van Empel, in Progress in Microbalance Techniques, edited by C. Eyraud and M, Escoubes (Heyden, New York, 1975), Vol.3, pp. 9-17.
22. E. P. EerNisse, in Applications of Piezoelectric Quartz Crystal Microbalances, edited by C. Lu and A. W. Czanderna (Elsevier, Amsterdam, 1984), pp. 125-149.
23. S. S. Narine, R. Hughes, and A. J. Slavin, Presented at the 43rd International Conference on. Analytical. Sciences and Spectroscopy, McGiIl University, Montreal, Quebec, 1997 (unpublished).
24. C. Feldman and M, Jansen, Angew. Chem. 32, 1049 (1993).
25. P. Ma and A. J. Slavin, J. Vac. Sci. Technol. A 11, 2003 (1993).
26. K. Reichelt and H. O. Lutz, J. Cryst. Growth 10, 103 (1971).
27. J. A. DeRose, T. Thundat, L. A. Nagahara, and S. M. Lindsay, Surf. Sci, 256, 102 (1991).
28. N. Elbel, H. Behner, and H. von Seggern, J. Vac. Sci. Technol. B 13, 2119(1995).