Surface modification of AFM silicon probes for adhesion and wear reduction

Tribology Letters

Volumn 21, Issue 1, 2006, Pages 1-16

  Tao, Z ^a   Bhushan, B ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

Adhesion; AFM probe; Coating; Image resolution; Nanotribology; Wear

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; IMAGE QUALITY; LUBRICATION; PROBES; SILICON; SURFACE TREATMENT; WEAR OF MATERIALS; WEAR RESISTANCE;

IMAGE RESOLUTION; NANOTRIBOLOGY; SILICON PROBE;

TRIBOLOGY;

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; IMAGE QUALITY; LUBRICATION; PROBES; SILICON; SURFACE TREATMENT; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE;

EID: 33644856435     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-005-9001-8     Document Type: Article

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