Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode

Measurement: Journal of the International Measurement Confederation

Volumn 25, Issue 3, 1999, Pages 203-211

  Bloo, M L ^a   Haitjema, H ^a   Pril, W O ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FATIGUE OF MATERIALS; PLASTIC DEFORMATION; SCANNING; SCANNING ELECTRON MICROSCOPY; WEAR OF MATERIALS;

ATOMIC FORCE MICROSCOPY TIP DEFORMATION; ATOMIC FORCE MICROSCOPY TIP WEAR; LOW CYCLE FATIGUE; SILICON NITRIDE PROBING TIP;

SILICON NITRIDE;

EID: 0033115617     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(99)00004-4     Document Type: Article

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