Aluminum nitride dielectrics for high energy density capacitors

Ceramic Transactions

Volumn 179, Issue , 2006, Pages 45-55

  Bray, Kevin R ^a   Wu, Richard L C ^a   Fries Carr, Sandra ^b   Weimer, Joseph ^b  

^a K Systems Corporation   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BREAKDOWN STRENGTH; CAPACITOR DEVICES; ENERGY DENSITY CAPACITORS; PROCESS PARAMETERS;

CAPACITORS; DECOMPOSITION; DIELECTRIC MATERIALS; PERMITTIVITY; SUBSTRATES; THERMAL EFFECTS;

ALUMINUM NITRIDE;

EID: 33644801234     PISSN: 10421122     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (12)

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