InP-based micro-opto-electro-mechanical systems (MOEMS)

Journal De Physique. IV : JP

Volumn 9, Issue 2, 1999, Pages

  Leclercq, J L ^a   Seassal, C ^a   Viktorovitch, P ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; HETEROJUNCTIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROACTUATORS; MICROMACHINING; MICROSENSORS; MICROSTRUCTURE; MOLECULAR BEAM EPITAXY; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING INDIUM PHOSPHIDE; THREE DIMENSIONAL;

ELECTROOPTOMECHANICAL CHARACTERISATION; ENVIRONMENTAL INTERACTION; HIGHER SENSITIVITY; LOW COST TECHNOLOGY; MICROSYSTEMS; OPTICAL SENSING METHODS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032669490     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1999213     Document Type: Article

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