Model-based insertion and optimization of assist features with application to contact layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5992, Issue 1, 2005, Pages

  Shang, Shumay D ^a   Granik, Yuri ^a   Swallow, Lisa ^a   Zhang, Li Guo ^a   Brist, Travis ^a   Torres, Andres ^a   Hung, Chi Yuan ^b   Liu, Qingwei ^b  

^a MENTOR GRAPHICS CORPORATION   (United States)

^b SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION   (China)

Author keywords

Contact layers; Mask Inversion; Mask Optimization; Mask Simplification; Optical Proximity Correction (OPC); Process window; Resolution enhancement techniques (RET); Sub Resolution Assist Feature (SRAF)

Indexed keywords

CONTACT LAYERS; MASK INVERSION; MASK OPTIMIZATION; MASK SIMPLIFICATION; OPTICAL PROXIMITY CORRECTION (OPC); PROCESS WINDOW; RESOLUTION ENHANCEMENT TECHNIQUES (RET); SUB-RESOLUTION ASSIST FEATURE (SRAF);

IMAGE ANALYSIS; OPTICAL RESOLVING POWER; OPTIMIZATION; PHOTOLITHOGRAPHY;

MASKS;

EID: 33644602459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.632345     Document Type: Conference Paper

References (7)

1. Granik, "Solving inverse problems of optical microlithography", Proc. SPIE vol. 5754 (2005) pp. 506-526
2. Mukherjee et al, "The problem of optimal placement if sub-resolution assist features (SRAF)", Proc. SPIE vol. 5754 (2005) pp. 1417-1429
3. Torres et al, "Contrast-based assist feature optimization", Proc. SPIE vol. 4691 (2002) pp. 179-188
4. Brist et al, "Model-assisted placement of sub-resolution assist features: experimental results", Proc. SPIE vol. 5042 (2003) pp. 99-106
5. Sosha et al, "Contact hole reticle optimization by using interference mapping lithography (IML™)", Proc. SPIE vol. 5446 (2004) pp. 516-524
6. Shieh, etc al, "A Proposal for the contact hole assist feature printing checker in IML™", Proc. SPIE vol. 5853 (2005) pp. 672-677
7. J.A. Torres, C.N. Berglund "Integrated circuit DFM framework for deep sub-wavelength processes". Proc. SPIN Vol. 5756 (2005), pp.39-50