메뉴 건너뛰기




Volumn 21, Issue 1, 2006, Pages 82-87

Grain growth in nanocomposite Ti-B-N films during deposition: The effect of amorphous phase precipitation

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPUTER SIMULATION; GRAIN BOUNDARIES; GRAIN GROWTH; GRAIN SIZE AND SHAPE; PRECIPITATION (CHEMICAL); SPUTTER DEPOSITION; THIN FILMS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33644504520     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0038     Document Type: Article
Times cited : (3)

References (28)
  • 2
    • 0032184047 scopus 로고    scopus 로고
    • Ultrahard Ti-B-N coatings obtained by reactive magnetron sputtering of a Ti-B target
    • C. Heau and J.P. Terrat: Ultrahard Ti-B-N coatings obtained by reactive magnetron sputtering of a Ti-B target. Surf. Coat. Technol. 108-109, 332 (1998).
    • (1998) Surf. Coat. Technol. , vol.108-109 , pp. 332
    • Heau, C.1    Terrat, J.P.2
  • 5
    • 0038013421 scopus 로고    scopus 로고
    • Study of thermal stability of some hard nitride coatings deposited by reactive magnetron sputtering
    • C. Heau, R.Y. Fillit, F. Vaux, and F. Pascaretti: Study of thermal stability of some hard nitride coatings deposited by reactive magnetron sputtering. Surf. Coat. Technol. 120-121, 200 (1999).
    • (1999) Surf. Coat. Technol. , vol.120-121 , pp. 200
    • Heau, C.1    Fillit, R.Y.2    Vaux, F.3    Pascaretti, F.4
  • 8
    • 0037461209 scopus 로고    scopus 로고
    • Recent advances of superhard nanocomposite coatings: A review
    • S. Zhang, D. Sun, Y.Q. Fu, and H. Du: Recent advances of superhard nanocomposite coatings: A review. Surf. Coat. Technol. 167, 113 (2003).
    • (2003) Surf. Coat. Technol. , vol.167 , pp. 113
    • Zhang, S.1    Sun, D.2    Fu, Y.Q.3    Du, H.4
  • 9
    • 18244391460 scopus 로고    scopus 로고
    • X-ray photoelectron spectroscopy characterization of reactively sputtered Ti-B-N thin films
    • Y.H. Lu, Z.F. Zhou, P. Sit, Y.G. Shen, K.Y. Li, and H. Chen: X-ray photoelectron spectroscopy characterization of reactively sputtered Ti-B-N thin films. Surf. Coat. Technol. 187, 98 (2004).
    • (2004) Surf. Coat. Technol. , vol.187 , pp. 98
    • Lu, Y.H.1    Zhou, Z.F.2    Sit, P.3    Shen, Y.G.4    Li, K.Y.5    Chen, H.6
  • 12
    • 1842715159 scopus 로고    scopus 로고
    • Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current magnetron sputtering
    • Y.G. Shen, Z.J. Liu, N. Jiang, H.S. Zhang, K.H. Chan, and Z.K. Xu: Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current magnetron sputtering. J. Mater. Res. 19, 523 (2004).
    • (2004) J. Mater. Res. , vol.19 , pp. 523
    • Shen, Y.G.1    Liu, Z.J.2    Jiang, N.3    Zhang, H.S.4    Chan, K.H.5    Xu, Z.K.6
  • 13
    • 0033677268 scopus 로고    scopus 로고
    • Structure evolution during processing of polycrystalline films
    • C.V. Thompson: Structure evolution during processing of polycrystalline films. Ann. Rev. Mater. Sci. 30, 159 (2000).
    • (2000) Ann. Rev. Mater. Sci. , vol.30 , pp. 159
    • Thompson, C.V.1
  • 14
    • 0003292336 scopus 로고    scopus 로고
    • Characterization of surface structure in sputtered Al films: Correlation to microstructure evolution
    • A.E. Lita and J.E. Sanchez, Jr.: Characterization of surface structure in sputtered Al films: Correlation to microstructure evolution. J. Appl. Phys. 85, 876 (1999).
    • (1999) J. Appl. Phys. , vol.85 , pp. 876
    • Lita, A.E.1    Sanchez Jr., J.E.2
  • 15
    • 0000245951 scopus 로고    scopus 로고
    • Effects of grain growth on dynamic surface scaling during the deposition of Al polycrystalline thin films
    • A.E. Lita. and J.E. Sanchez, Jr.: Effects of grain growth on dynamic surface scaling during the deposition of Al polycrystalline thin films. Phys. Rev. B 61, 7692 (2000).
    • (2000) Phys. Rev. B , vol.61 , pp. 7692
    • Lita, A.E.1    Sanchez Jr., J.E.2
  • 16
    • 0041360188 scopus 로고
    • A grain growth model for evolution of polycrystalline surfaces
    • A.J. Dammers and S. Radelaar: A grain growth model for evolution of polycrystalline surfaces. Mater. Sci. Forum. 94-96, 345 (1991).
    • (1991) Mater. Sci. Forum. , vol.94-96 , pp. 345
    • Dammers, A.J.1    Radelaar, S.2
  • 17
    • 84903796521 scopus 로고
    • Grain growth in thin films: A Monte-Carlo approach
    • D.J. Srolovitz: Grain growth in thin films: A Monte-Carlo approach. J. Vac. Sci. Technol. A 4, 2925 (1986).
    • (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2925
    • Srolovitz, D.J.1
  • 19
    • 0009111874 scopus 로고
    • Analytical and numerical modeling of columnar evolution in thin films
    • D.J. Srolovitz, A. Mazor, and B.G. Bukiet: Analytical and numerical modeling of columnar evolution in thin films. J. Vac. Sci. Technol. A 6, 2371 (1988).
    • (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2371
    • Srolovitz, D.J.1    Mazor, A.2    Bukiet, B.G.3
  • 20
    • 0032669845 scopus 로고    scopus 로고
    • Simulation of faceted film growth in two-dimensions: Microstructure, morphology and texture
    • C. Paritosh, D.J. Srolovitz, C.C. Battaile, X. Li, and J.E. Butler: Simulation of faceted film growth in two-dimensions: Microstructure, morphology and texture. Acta Mater. 47, 2269 (1999).
    • (1999) Acta Mater. , vol.47 , pp. 2269
    • Paritosh, C.1    Srolovitz, D.J.2    Battaile, C.C.3    Li, X.4    Butler, J.E.5
  • 21
    • 0019082789 scopus 로고
    • Microstructure and normal grain growth in metals and ceramics. 1: Theory
    • S.K. Kurtz and F.M.A. Carpay: Microstructure and normal grain growth in metals and ceramics. 1: Theory. J. Appl. Phys. 51, 5725 (1980).
    • (1980) J. Appl. Phys. , vol.51 , pp. 5725
    • Kurtz, S.K.1    Carpay, F.M.A.2
  • 22
    • 0024649637 scopus 로고
    • Self-similarity and growth-kinetics driven by surface free energy reduction
    • W.W. Mullins and J. Vinals: Self-similarity and growth-kinetics driven by surface free energy reduction. Acta Metall. 37, 991 (1989).
    • (1989) Acta Metall. , vol.37 , pp. 991
    • Mullins, W.W.1    Vinals, J.2
  • 23
    • 20944439237 scopus 로고    scopus 로고
    • Modified Monte Carlo method for grain growth simulation
    • X.Y. Song, G.Q. Liu, and Y.Z. He: Modified Monte Carlo method for grain growth simulation. Prog. Nat. Sci. 8, 92 (1998).
    • (1998) Prog. Nat. Sci. , vol.8 , pp. 92
    • Song, X.Y.1    Liu, G.Q.2    He, Y.Z.3
  • 24
    • 51249167569 scopus 로고
    • Simulation of curvature-driven grain growth by using a modified Monte Carlo algorithm
    • B. Radhakrishnan and T. Zacharia: Simulation of curvature-driven grain growth by using a modified Monte Carlo algorithm. Metall. Mater. Trans. A 26, 167 (1995).
    • (1995) Metall. Mater. Trans. A , vol.26 , pp. 167
    • Radhakrishnan, B.1    Zacharia, T.2
  • 25
    • 0024629044 scopus 로고
    • Computer-simulation of normal grain-growth in 3 dimensions
    • M.P. Anderson, G.S. Grest, and D.J. Srolovitz: Computer-simulation of normal grain-growth in 3 dimensions. Philos. Mag. B 59, 293 (1989).
    • (1989) Philos. Mag. B , vol.59 , pp. 293
    • Anderson, M.P.1    Grest, G.S.2    Srolovitz, D.J.3
  • 26
    • 0001100812 scopus 로고
    • Domain-growth kinetics for the Q-state Potts-model in 2-dimension and 3-dimension
    • G.S. Grest, M.P. Anderson, and D.J. Srolovitz: Domain-growth kinetics for the Q-state Potts-model in 2-dimension and 3-dimension. Phys. Rev. B 38, 4752 (1988).
    • (1988) Phys. Rev. B , vol.38 , pp. 4752
    • Grest, G.S.1    Anderson, M.P.2    Srolovitz, D.J.3
  • 27
    • 4243760087 scopus 로고
    • Dynamic scaling in the Q-state Potts model
    • S. Kumar, J.D. Gunton, and K. Kaski: Dynamic scaling in the Q-state Potts model. Phys. Rev. B 35, 8517 (1987).
    • (1987) Phys. Rev. B , vol.35 , pp. 8517
    • Kumar, S.1    Gunton, J.D.2    Kaski, K.3
  • 28
    • 0000459577 scopus 로고
    • Numerical simulation of a coarsening two-dimensional network
    • C.W.J. Beenakker: Numerical simulation of a coarsening two-dimensional network. Phys. Rev. A 37, 1697 (1988).
    • (1988) Phys. Rev. A , vol.37 , pp. 1697
    • Beenakker, C.W.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.