Transport of sputtered atoms in facing targets sputtering geometry: A numerical simulation study

Journal of Applied Physics

Volumn 84, Issue 1, 1998, Pages 564-571

  Senthil Nathan, S ^a   Mohan Rao, G ^a   Mohan, S ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3342996734     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368061     Document Type: Article

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