Characterization of electron beam evaporated ZnO thin films and stacking ZnO fabricated by e-beam evaporation and rf magnetron sputtering for the realization of resonators

Microelectronic Engineering

Volumn 83, Issue 3, 2006, Pages 393-398

  Al Asmar, R ^a,b,c   Zaouk, D ^d   Bahouth, Ph ^b   Podleki, J ^a   Foucaran, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b Saint Joseph School   (Lebanon)

^c Faculte des Sciences II   (Lebanon)

^d SAINT JOSEPH UNIVERSITY   (Lebanon)

Author keywords

Annealing treatment; Electron beam evaporation; Optical measurements; Resonator; Structural properties; Zinc oxide

Indexed keywords

ELECTRON BEAMS; EVAPORATION; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; ZINC OXIDE;

ANNEALING TREATMENT; ELECTRON BEAM EVAPORATION; OPTICAL MEASUREMENTS; RESONATOR;

THIN FILMS;

EID: 33244495334     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.10.010     Document Type: Article

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