Spectrophotometry in the vacuum UV

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4932, Issue , 2003, Pages 544-548

  Heber, J ^a   Gatto, A ^a   Kaiser, N ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Spectrophotometry; Thin films; UV cleaning; Vacuum UV

Indexed keywords

EXCIMER LASERS; IRRADIATION; LIGHT REFLECTION; LIGHT TRANSMISSION; THIN FILMS;

SPECTRAL TRANSMITTANCE;

ULTRAVIOLET SPECTROPHOTOMETERS;

EID: 0042862969     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472400     Document Type: Conference Paper

References (4)

1. 3 thin films Opt. Eng. 4099, 299 (2000)
2. P. Kadkhoda, H. Blaschke, J. Kohlhaas, D. Ristau: Investigation of transmission and reflectance in the DUV/VUV spectral range. Proc. SPIE 4099, 311 (2000)
3. E.D. Palik: Handbook of Optical Constants of Solids (Academic Press, Sand Diego 1998)
4. J.H. Burnett, R. Gupta, U. Griesmann: Applied Optics 41, 2508 (2002)