New laser pattern generator for DUV using a spatial light modulator

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 23-29

  Ljungblad, U ^a   Dauderstadt U ^b   Durr P ^b   Sandstrom T ^a   Buhre, H ^a   Lakner, H ^b  

^a Micronic Laser Systems AB   (Sweden)

^b FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

DUV; Micromirror; Pattern generator; Photomask; SLM

Indexed keywords

ELECTRON BEAMS; LASER OPTICS; LIGHT MODULATION; LIGHT MODULATORS; MIRRORS;

LASER PATTERN GENERATORS;

MASKS;

EID: 4243811270     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00531-7     Document Type: Article

References (4)

1. Deformable micromirror devices as phase modulating high resolution light valves
2. Micromirror spatial light modulators