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Volumn 88, Issue 7, 2006, Pages

Reduction of hafnium oxide and hafnium silicate by rhenium and platinum

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC CORE-LEVEL SHIFTS; HYDROXYL GROUPS; PREMETALLIZATION;

ANNEALING; DIELECTRIC MATERIALS; PLATINUM; REDUCTION; RHENIUM; THRESHOLD VOLTAGE; X RAY PHOTOELECTRON SPECTROSCOPY;

HAFNIUM COMPOUNDS;

EID: 32944455687 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2177360 Document Type: Article

Times cited : (26)

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