Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)

Thin Solid Films

Volumn 501, Issue 1-2, 2006, Pages 211-215

  Lau, Kenneth K S ^a   Mao, Yu ^a   Lewis, Hilton G Pryce ^b   Murthy, Shashi K ^a   Olsen, Brad D ^a   Loo, Leslie S ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology   (United States)

^b GVD Corporation   (United States)

Author keywords

Hot wire deposition; Poly(glycidyl methacrylate); Polymer CVD; Polytetrafluoroethylene

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CROSSLINKING; DEPOSITION; NANOSTRUCTURED MATERIALS; POLYMERS; POLYTETRAFLUOROETHYLENES; ULTRATHIN FILMS;

HOT-WIRE DEPOSITION; ORGANOSILICON POLYMERS; POLY(GLYCIDYL METHACRYLATE); POLYMER CVD;

COATINGS;

EID: 32644431782     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.208     Document Type: Conference Paper

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