Initiation of cyclic vinylmethylsiloxane polymerization in a hot-filament chemical vapor deposition process

Langmuir

Volumn 18, Issue 16, 2002, Pages 6424-6428

  Murthy, Shashi K ^a   Olsen, Bradley D ^a   Gleason, Karen K ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FLUOROCARBONS; HYDROCARBONS; INITIATORS (CHEMICAL); POLYMERIZATION; PYROLYSIS; THIN FILMS;

POLYMERIC FILMS;

SILICONES;

EID: 0037031465     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la025815v     Document Type: Article

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