Silicon nanomechanical resonators with a double-triangle cross section leading to an enhanced mass sensitivity

Applied Physics Letters

Volumn 88, Issue 6, 2006, Pages

  De Vlaminck, I ^a,b   De Greve, K ^a,b   Lagae, L ^a   Borghs, G ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MASS DETECTION; SILICON NANOMECHANICAL RESONATORS;

MATHEMATICAL MODELS; NATURAL FREQUENCIES; SILICON;

OPTICAL RESONATORS;

EID: 32444440592     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2172236     Document Type: Review

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