Effect of solvent on MOCVD of Pb(Zr, Ti)O3 films with liquid-delivery source supply method

Journal of the Electrochemical Society

Volumn 151, Issue 7, 2004, Pages

  Funakubo, Hiroshi ^a   Asano, Gouji ^a   Ozeki, Tomohiko ^a   Machida, Hideaki ^b   Yoneyama, Takeo ^c   Takamatsu, Yukichi ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TRI Chemical Laboratory Inc   (Japan)

^c Japan Pionics Company Limited   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; FLUORESCENCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAD COMPOUNDS; METALLIC FILMS; RANDOM ACCESS STORAGE; SOLVENTS; STOICHIOMETRY; SUBLIMATION; X RAY ANALYSIS;

BUBBLING; FERROELECTRIC RANDOM ACCESS MEMORY (FERAM); LIQUID-DELIVERY METHOD; TETRAHYDROFURAN VAPORS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 3242700791     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1751194     Document Type: Article

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