MOCVD of PZT Thin Films with Different Precursor Solutions for Testing Mass-Production Compatibility

Journal of the Electrochemical Society

Volumn 150, Issue 10, 2003, Pages

  Jeong, Seehwa ^a   Shi Zhao, Jin ^a   Kim, Hye Ryoung ^a   Park, Dong Yeon ^a,c   Hwang, Cheol Seong ^a   Han, Young Ki ^b   Yang, Cheol Hoon ^b   Oh, Ki Young ^b   Kim, Seung Hyun ^c   Lee, Dong Soo ^c   Ha, Jowoong ^c  

^a Seoul National University   (South Korea)

^b JuSung Engineering Limited   (South Korea)

^c INOSTEK Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION; MORPHOLOGY; PIEZOELECTRIC MATERIALS;

PRECURSORS;

THIN FILMS;

EID: 17144461920     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1602082     Document Type: Article

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