Distinguished student paper: An LTPS active-matrix process without ion doping

Digest of Technical Papers - SID International Symposium

Volumn 36, Issue 2, 2005, Pages 1266-1269

  Baur, Holger ^a   Jelting, Sven ^a   Benson, Niels ^a   Fruehauf, Norbert ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INVESTMENTS; ION IMPLANTATION; LIQUID CRYSTAL DISPLAYS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS;

ACTIVE MATRIX PROCESS; AMOLED; DOPED SILICON; INTRINSIC SILICON;

POLYSILICON;

EID: 32244432071     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.2036235     Document Type: Conference Paper

References (8)

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