Nonvolatile memory properties of thin oxides with single- and multi-layered Si nanocrystals obtained by ion beam sputtering

Journal of the Korean Physical Society

Volumn 48, Issue 1, 2006, Pages 108-112

  Kim, Sung ^a   Hwang, Hyung Sun ^a   Choi, Suk Ho ^a   Kim, Kyung Joong ^b  

^a Kyung Hee University   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

C V curves; Flat band voltage shift; Ion beam sputtering; Nonvolatile memory; Photoluminescence; Si nanocrystals

Indexed keywords

EID: 32044462286     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Pranzo and F. Priolo, Nature 408, 440 (2000).
2. Jun-Sung Bae, Suk-Ho Choi, Kyung Joong Kim and Dae Won Moon, J. Korean Phys. Soc. 43, 557 (2003).
3. S. H. Hong, S. Kim, S-H. Choi, K. J. Kim, D. W. Moon, T. D. Kang and H. Lee, J. Korean Phys. Soc. 45, 116 (2004).
4. M. Zacharias, J. Heitmann, R. Scholz, U. Kahler, M. Schmidt and J. Biasing, Appl. Phys. Lett. 80, 661 (2002).
5. K-J. Lee, T-D. Kang, H. Lee, S. H. Hong, S-H. Choi, T-Y. Seong, K. J. Kim and D. W. Moon, Thin Solid Films 476, 196 (2005).
6. K. J. Kim, D. W. Moon, S-H. Hong, S-H. Choi, M-S. Yang, J-H. Jhe and J. H. Shin, Thin Solid Films 478, 216 (2005).
7. B. Garrido, S. Cheylan, O. Gonzalez-Varona, A. Perez-Rodriguez and J. R. Morante, Appl. Phys. Lett. 82, 4818 (2003).
8. D. N. Kouvatsos, V. loannou-Sougleridis and A. G. Nassiopoulou, Appl. Phys. Lett. 82, 397 (2002).
9. R. Ohba, N. Sugiyama, K. Uchida, J. Koga and A. Toriumi, IEEE Trans. Electron Dev. 49, 1392 (2002).
10. R. F. Steimle, M. Sadd, R. Muralidhar, R. Rao, B. Hrad-sky, S. Straub and B. E. White, Jr., IEEE Trans. Nan-otechnol. 2, 335 (2003).
11. Y. H. Kwon, C. J. Park, W. C. Lee, D. J. Fu, Y. Shon, T. W. Kang, C. Y. Hong, H. Y. Cho and K. L. Wang, Appl. Phys. Lett. 80, 2502 (2002).
12. M. Perego, S. Ferrari, M. Fanciulli, G. B. Assayag, C. Bonafos, M. Carrada and A. Claverie, J. Appl. Phys. 95, 257 (2004).
13. K. J. Kim and D. W. Moon, Surf. Interface Anal. 26, 9 (1998).
14. N-M. Park, S-H. Jeon, H-D. Yang, H. Hwang, S-J. Park and S-H. Choi, Appl. Phys. Lett. 83, 1014 (2003).
15. N-M. Park, S-H. Choi and S-J. Park, Appl. Phys. Lett. 81, 1092 (2002).
16. M. Nishida, Phys. Rev. B 70, 113303 (2004).