Optical characterization of Si nanocrystals in Si-rich SiO x and SiO x/SiO 2 multilayers grown by ion beam sputtering

Journal of the Korean Physical Society

Volumn 45, Issue 1, 2004, Pages 116-119

  Hong, Seung Hui ^a   Kim, Sung ^a   Choi, Suk Ho ^a   Lee, Kang Ju ^a   Lee, Hosun ^a   Kim, Kyung Joong ^b   Moon, Dae Won ^b  

^a Kyung Hee University   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Ion beam sputtering; Nanocrystals; Photoluminescence; Quantum confinement effect; SiO x SiO 2 multilayers; Stoichiometry; Substrate temperature

Indexed keywords

EID: 3843105646     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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