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Volumn 44, Issue 24-27, 2005, Pages

Recovery from dry etching damage in ZnTe by thermal annealing

Author keywords

Reactive ion etching; Recovery; Surface damage; Thermal annealing; Zinc telluride

Indexed keywords

ANNEALING; REACTIVE ION ETCHING; RECOVERY;

SURFACE DAMAGE; THERMAL ANNEALING; ZINC TELLURIDE;

ZINC COMPOUNDS;

EID: 32044456456 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.L863 Document Type: Article

Times cited : (2)

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