New advance in confocal microscopy

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 596-600

  Yin, Chunyong ^a   Lin, Dejiao ^a,b   Liu, Zhongyao ^a   Jiang, Xiangqian ^b  

^a TSINGHUA UNIVERSITY   (China)

^b UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

Author keywords

Common path; Confocal microscopy; Heterodyne interferometer; Line width; Masks; Step height

Indexed keywords

ELECTROMAGNETIC WAVE POLARIZATION; HETERODYNING; INTERFEROMETRY; MASKS; MICROELECTRONICS; OPTICAL VARIABLES MEASUREMENT; SCANNING;

COMMON-PATH; CONFOCAL MICROSCOPY; HETERODYNE INTERFEROMETER; LINE-WIDTH; STEP HEIGHT;

OPTICAL MICROSCOPY;

ELECTROMAGNETIC WAVE POLARIZATION; HETERODYNING; INTERFEROMETRY; MASKS; MICROELECTRONICS; OPTICAL MICROSCOPY; OPTICAL VARIABLES MEASUREMENT;

EID: 31644439429     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S23     Document Type: Article

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