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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 185-189

Crystallographic and electrical characterization of tungsten carbide thin films for Schottky contact of diamond photodiode

(3) Liao, Meiyong a Koide, Yasuo a Alvarez, Jose a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; DIAMONDS; PHOTODIODES; SAPPHIRE; SILICON; SPUTTER DEPOSITION; SUBSTRATES; TUNGSTEN COMPOUNDS;

ELECTRICAL CHARACTERIZATION; RECTIFYING RATIO; TUNGSTEN CARBIDES;

THIN FILMS;

EID: 31544468140 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2151909 Document Type: Article

Times cited : (13)

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