Grazing incidence small angle X-ray scattering investigation of tungsten-carbon films produced by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 218-221

  Dubcek, P ^a   Radic, N ^b   Milat, O ^c   Bernstorff, S ^a  

^a SINCROTRONE TRIESTE   (Italy)

^b RUDER BO KOVI INSTITUTE   (Croatia)

^c INSTITUTE OF PHYSICS   (Croatia)

Author keywords

Grazing incidence; Magnetron sputtering; Small angle X ray scattering; Tungsten carbide

Indexed keywords

ARGON; BENZENE; CARBON; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SUBSTRATES; TUNGSTEN; X RAY SCATTERING;

MONOCRYSTALLINE SILICON;

THIN FILMS;

CARBON; FILM; SPUTTERING; TUNGSTEN; X-RAY TECHNIQUE;

EID: 17544389705     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01560-2     Document Type: Article

References (11)