Preparation of single phase tungsten carbide by annealing of sputtered tungsten-carbon layers

Thin Solid Films

Volumn 359, Issue 2, 2000, Pages 146-149

  Romanus, H ^a   Cimalla, V ^a   Schaefer, J A ^a   Spiess L ^a   Ecke, G ^a   Pezoldt, J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; FILM PREPARATION; METALLIZING; PHASE TRANSITIONS; SPUTTER DEPOSITION;

SPUTTERED TUNGSTEN-CARBON LAYERS;

TUNGSTEN CARBIDE;

EID: 0033883132     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00732-4     Document Type: Article

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