Experimentation and modeling of organic photocontamination on lithographic optics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 3, 2000, Pages 1306-1313

  Kunz, R R ^a   Liberman, V ^a   Downs, D K ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DEPOSITION; OZONE; ULTRAVIOLET RADIATION;

PHOTOCONTAMINATION; PHOTODEPOSITION;

PHOTOLITHOGRAPHY;

EID: 0034187907     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591379     Document Type: Article

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