Effects of single-crystalline GaN target on GaN thin films in pulsed laser deposition process

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 11, 2005, Pages 7896-7900

  Nagata, Takahiro ^a   Yoo, Young Zo ^b   Ahmet, Parhat ^b   Chikyow, Toyohiro ^b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Epitaxy; GaN thin films; Optical emission spectroscopy; Pulsed laser deposition

Indexed keywords

CERAMIC MATERIALS; LASER ABLATION; PULSED LASER DEPOSITION; SAPPHIRE; SINGLE CRYSTALS; SINTERING; THIN FILMS;

GAN SINGLE-CRYSTAL TARGET (SC-GAN); OPTICAL EMISSION SPECTROSCOPY; SINTERED CERAMICS;

GALLIUM NITRIDE;

EID: 31544455221     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7896     Document Type: Article

References (19)

1. S. Nakamura and G. Fasol: The Blue Laser Diode (Springer, Heidelberg, 1997).
2. S. Strite and H. Morkoç: J. Vac. Sci. Technol. B 10 (1992) 1237.
3. G. Koren, A. Gupta, E. A. Giess, A. Segmüller and R. B. Laibowitz: Appl. Phys. Lett. 54 (1989) 1054.
4. Y.-Z. Yoo, T. Chikyow, P. Ahmet, M. Kawasaki, T. Makino, Y. Segawa and H. Koinuma: Adv. Mater. 23 (2001) 1624.
5. R. D. Vispute, V. Talyansky, R. P. Sharma, S. Choopun, M. Downes, T. Venkatesan, K. A. Jones, A. A. Iliadis, M. Asif Khan and J. W. Yang: Appl. Phys. Lett. 71 (1997) 102.
6. T. Huang, A. Marshall, S. Spruytte and J. S. Harris, Jr.: J. Cryst. Growth 200 (1999) 362.
7. R. P. Wang, H. Muto, Y. Yamada and T. Kusumori: Thin Solid Films 411 (2002) 69.
8. S. Ito, J. Ohta, H. Fujioka and M. Oshima: Appl. Surf. Sci. 197-198 (2002) 384.
9. A. Yoshida, B. S. Chang, K. Ouyang and A. Wakahara: Thin Solid Films 343-344 (1999) 127.
10. H. Mott-Smith and I. Langmuir: Phys. Rev. 28 (1926) 727.
11. M. Yoshimoto, T. Maeda, T. Ohnishi and H. Koinuma: Appl. Phys. Lett. 67 (1995) 2615.
12. M. S. Yi, H. Lee, D. J. Kim, S. J. Park, D. Y. Noh, C. C. Kim and J. H. Je: Appl. Phys. Lett. 75 (1999) 2187.
13. V. Narayanan, K. Lorenz, W. Kim and S. Mahajan: Philos. Mag. A 82 (2002) 885.
14. C. K. Kim, I. K. Robinson, J. Myoung, K. Shim, M.-C. Yoo and K. Kim; Appl. Phys. Lett. 69 (1996) 2358.
15. J. E. Heidenreich III, J. R. Paraszczak, M. Moisan and G. Suave: J. Vac. Sci. Technol. B 5 (1987) 347.
16. A. A. Shatas, Y. Z. Hu and E. A. Irene: J. Vac. Sci. Technol. A 10 (1992) 3119.
17. J. T. Gudmundsson, J. Alami and U. Helmesson: Appl. Phys. Lett. 78 (2001) 3427.
18. Y. Kuk, T. Sakurai, R. J. Culbertson and G. H. Robertson: Appl. Phys. Lett. 36 (1980) 957.
19. E. Moore: Table of Spectra of Hydrogen, Carbon, Nitrogen, and Oxygen Atoms and Ions (Chemical Rubber, Boca Raton, FL, 1993).