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Volumn 41, Issue 11 B, 2002, Pages 6754-6757

Fabrication of ferroelectric microcapacitors with self-aligned top electrodes by electron-beam-induced patterning process

Author keywords

Capacitor; Electron beam induced process; Ferroelectric; Lift off; Micropatterning; Self align; Top electrode

Indexed keywords

ELECTRODES; ELECTRON BEAMS; FERROELECTRIC DEVICES; IRRADIATION; THIN FILMS;

ELECTRON-BEAM-INDUCED PROCESS; FERROELECTRIC; LIFT-OFF; MICROPATTERNING; SELF-ALIGN; TOP ELECTRODE;

CAPACITORS;

EID: 31544445170 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.41.6754 Document Type: Article

Times cited : (11)

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