Crystallization of precursor micropatterns of ferroelectric Bi4Ti3O12 fabricated by electron beam scanning

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 9 SUPPL. B, 1996, Pages 5224-5228

  Okamura, Soichiro ^a   Yagi, Yukie ^a   Kakimi, Atsushi ^b   Ando, Shizutoshi ^b   Mori, Katsumi ^a   Tsukamoto, Takeyo ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Bi4Ti3O12; Crystallization; Electron beam; Ferroelectric; Metal octylate; Patterning; Thin film

Indexed keywords

ELECTRON BEAM SCANNING; PRECURSOR MICROPATTERNS;

BISMUTH; CRYSTALLIZATION; ELECTRON BEAMS; EXPERIMENTS; SCANNING; THIN FILMS; TITANIUM;

FERROELECTRIC MATERIALS;

EID: 0030234295     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5224     Document Type: Article

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