Focused ion beam patterning for fabrication of periodical two-dimensional zinc oxide nanodot arrays

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 5 B, 2004, Pages

  Ueda, Masaya ^a   Kim, Sang Woo ^a   Fujita, Shizuo ^a   Fujita, Shigeo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Artificial nanostructure; FIB; Nanodot; Two dimensional array; Zno

Indexed keywords

CATHODOLUMINESCENCE; CRYSTAL GROWTH; ENERGY DISPERSIVE SPECTROSCOPY; ION BEAMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY;

ARTIFICIAL NANOSTRUCTURES; FIB; FOCUSED ION BEAM (FIB); NANODOTS; TO-DIMENSIONAL ARRAYS; ZNO;

ZINC OXIDE;

EID: 3142742563     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.43.l652     Document Type: Article

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