Ultrarapid nanostructuring of poly(methylmethacrylate) films using Ga+ focused ion beams

Applied Physics Letters

Volumn 82, Issue 3, 2003, Pages 346-348

  Liu, Y ^a   Longo, D M ^a,b   Hull, R ^a  

^a University of Virginia   (United States)

^b Finnegan Henderson Farabow Garrett and Dunner LLP   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTOMERS; ION BEAMS; ION BOMBARDMENT; NANOTECHNOLOGY; PLASTICS MOLDING; POLYMETHYL METHACRYLATES; POSITIVE IONS; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

ULTRARAPID NANOSTRUCTURING;

PLASTIC FILMS;

EID: 0037455249     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1536252     Document Type: Article

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