Lateral control of self-assembled island nucleation by focused-ion-beam micropatterning

Applied Physics Letters

Volumn 82, Issue 7, 2003, Pages 1093-1095

  Kammler, M ^a,b   Hull, R ^a   Reuter, M C ^b   Ross, F M ^b  

^a University of Virginia   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; NUCLEATION; SELF ASSEMBLY; SPUTTERING; SURFACE ACTIVE AGENTS;

LATERAL CONTROL;

ION BEAMS;

EID: 0037450220     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1542680     Document Type: Article

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