Self-assembled three-dimensional ZnO nanosize islands on Si substrates with SiO2 intermediate layer by metalorganic chemical vapour deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 5 B, 2002, Pages

  Kim, Sang Woo ^a   Fujita, Shizuo ^a   Fujita, Shigeo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

MOCVD; Nano islands; Self organization; Si substrates; SiO2; ZnO

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NUCLEATION; PROBABILITY; SELF ASSEMBLY; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; SILICA; THERMAL EFFECTS; ZINC OXIDE;

NANOSIZE ISLANDS;

NANOSTRUCTURED MATERIALS;

EID: 0037095550     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l543     Document Type: Article

References (18)