Ultrahigh-sensitive tin-oxide microsensors for H2S detection

IEEE Sensors Journal

Volumn 4, Issue 4, 2004, Pages 449-454

  Esfandyarpour, Behzad ^a   Mohajerzadeh, Shams ^a   Khodadadi, Abbas Ali ^a   Robertson, Michael D ^b  

^a UNIVERSITY OF TEHRAN   (Iran)

^b ACADIA UNIVERSITY   (Canada)

Author keywords

Micromachining; Microsensor; SnO2 sensor; Sol gel; Thin film

Indexed keywords

CARRIER CONCENTRATION; HYDROGEN SULFIDE; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS; SOL-GELS; THIN FILMS; TIN COMPOUNDS;

MICORSENSORS; SURFACE POROSITY; THIN-FILM SENSORS; THRESHOLD LIMIT VALUES (TLV);

CHEMICAL SENSORS;

EID: 3142730584     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.828858     Document Type: Article

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