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Volumn 77, Issue 1-2, 2001, Pages 496-502
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SnO2 sol-gel derived thin films for integrated gas sensors
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Author keywords
Gas microsensor; Oxidizing gas; Reducing gas; Sol gel; Tin dioxide
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Indexed keywords
FILM PREPARATION;
GRAIN SIZE AND SHAPE;
NANOSTRUCTURED MATERIALS;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTING TIN COMPOUNDS;
SILICON SENSORS;
THIN FILMS;
INTEGRATED GAS SENSORS;
OXYGEN SENSORS;
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EID: 0035876320
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-4005(01)00755-9 Document Type: Article |
Times cited : (43)
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References (8)
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