Laser direct writing and doping of diamond-like carbon, polycrystalline diamond, and single crystal silicon carbide

Journal of Laser Applications

Volumn 16, Issue 2, 2004, Pages 92-99

  Salama, A ^a   Quick, N R ^b   Kar, A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Applicote Associates   (United States)

Author keywords

Direct write; Laser doping; N type; Schottky barrier

Indexed keywords

BINDING ENERGY; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); ELECTRIC PROPERTIES; NEODYMIUM LASERS; POLYCRYSTALLINE MATERIALS; SCHOTTKY BARRIER DIODES; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; SILICON WAFERS; WAVELENGTH DISPERSIVE SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER DIRECT WRITING; LASER DOPING; LASER TREATMENT;

LASER APPLICATIONS;

EID: 3142717262     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.1710884     Document Type: Article

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