Electrical characterization of laser-irradiated 4h-SiC wafer

Materials Research Society Symposium - Proceedings

Volumn 719, Issue , 2002, Pages 73-78

  Salama, I ^a   Quick, N R ^b   Kar, A ^a   Chung, Gilyong ^c  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Applicote Associates   (United States)

^c Sterling Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION; ELECTRONIC PROPERTIES; LASER APPLICATIONS; SILICON CARBIDE; THERMAL CONDUCTIVITY;

LASER FABRICATION;

SILICON WAFERS;

EID: 0036450174     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-719-f3.2     Document Type: Conference Paper

References (18)

1. st Edition (John Wiley & Sons, New York, 2001) pp. 93-147.
2. O. Madelung, "Data in Science and Technology: Semiconductors Group IV Elements and III-V Compounds" (Springer-Verlag, Berlin, 1991) p. 101.
3. H. Shin, S. Hong, T. Wetteroth, S.R. Wilson. D.K. Schroder, Appl. Phys. Lett. 72, 1199, (1998).
4. R. Pengelly, Compound Semiconductor, issue 6 No.4 (2000).
5. D.H. Navon, Electronic Materials and Devices, 1st Edition (Boston: Houghton company 1975) pp.133-135.
6. N.R. Quick, in proceedings of International Symposium on Novel Techniques in Synthesis and Processing of Advanced Materials", edited by J. Singh and S.M. Copley (TMS,Warrendale, PA, 1994) p. 419.
7. N.R. Quick in "Proceedings of the International Conference on Lasers' 94" edited by V.J. Corcoran and T.A. Goldman. (STS press, Virginia, 1995) p. 696.
8. N.R. Quick, Converting ceramic materials to electrical conductors and semiconductors, US Patent No 5145741 (Sept. 1992).
9. N.R. Quick, Laser synthesized ceramic electronic devices and circuits, US Patent No 5837607 (Nov. 1998).
10. N.R. Quick, Laser synthesized ceramic electronic devices method of making, US Patent No 6025609 (Feb.2000).
11. N.R. Quick, method for making laser synthesized ceramic electronic devices and circuits, US Patent No 6054375 (April 2000).
12. D.K. Sengupta, N.R. Quick, A. Kar, J. Laser Applications 13, 26 (2001).
13. I. Salama, N.R. Quick, A. Kar, "Laser Doping of SiC substrates", J. Elec. Mats. 31, 3, 200-208 (2002).
14. I.A. Salama, N.R. Quick, and A. Kar "Microstructural Effects on Electrical Resistance in Laser-treated Silicon Carbide" Submitted for publication in Mater. Sci. Eng. B.
15. I.A. Salama, N.R. Quick, and A. Kar in "Surface Engineering: Science & Technology II" Edited by Ashok Kumar, Yip-Wah Chung, John J. Moore, Gary L. Doll, Kyoshi Yatsui and D.S. Misra.(TMS, Annual Meeting Proc., Warrendale, PA 2002) pp 113-124.
16. I. Salama, N.R. Quick, and A. Kar "Direct Writing and Doping in Polycrystalline Diamond for Electronic Device Applications" prepared for publications.
17. G.L. Harris "Properties of Silicon Carbide" (INSPEC; the Institute of Electrical Engineers, London, 1995) pp. 153-157.
18. S. Krishnan, G.C. Couto, M.I. Chaudhry, and S.V. Babu. J. Mat. Res. 10, 11 (1995) pp, 2723-2727.