Laser direct write of conducting and insulating tracks in silicon carbide

Materials Research Society Symposium - Proceedings

Volumn 624, Issue , 2000, Pages 127-133

  Sengupta, D K ^a   Quick, N R ^a   Kar, A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED ENGINEERING; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; FILMS; INSULATING MATERIALS; IRRADIATION; LASER APPLICATIONS; OXYGEN; SEMICONDUCTOR MATERIALS;

COMPUTER PROGRAM CONTROLLED GALVO-MIRROR; DIRECT CONVERSION TECHNIQUE; INSULATING SILICON CARBIDE FILM; LASER DIRECT WRITE; LASER IRRADIATED SILICON CARBIDE CONDUCTOR; LASER IRRADIATION;

SILICON CARBIDE;

EID: 0034447770     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-624-127     Document Type: Conference Paper

References (19)