Photon effect on radiative properties of silicon during rapid thermal processing

Journal of Applied Physics

Volumn 82, Issue 2, 1997, Pages 830-835

  Chen, G ^a,b   Borca Tasciuc, T ^a,b   Fair, R B ^a  

^a Duke University   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037599225     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365780     Document Type: Article

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