Kinetic Monte Carlo simulation of nucleation on patterned substrates

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 3, 2001, Pages

  Nurminen, L ^a   Kuronen, A ^a   Kaski, K ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; DIFFUSION; DRY DEPOSITION; MATHEMATICAL ANALYSIS; MOLECULAR MODEL; SEMICONDUCTOR; STRUCTURE ANALYSIS; SYSTEM ANALYSIS;

EID: 0035131275     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.035407     Document Type: Article

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