Influence of microstructure of substrate surface on early stage of thin film growth

Vacuum

Volumn 56, Issue 3, 2000, Pages 185-190

  Wei, Helin ^a   Liu, Zuli ^a   Yao, Kailun ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL DEFECTS; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; FRACTALS; MONTE CARLO METHODS; MORPHOLOGY; SUBSTRATES; SURFACE STRUCTURE; THERMAL EFFECTS; THIN FILMS;

ISLAND FILM GROWTH;

FILM GROWTH;

EID: 0033887288     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00193-1     Document Type: Article

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