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Journal of Applied Physics

Volumn 96, Issue 1, 2004, Pages 224-228

Electronic behaviors of high-dose phosphorus-ion implanted 4H-SiC (0001)

(4) Negoro, Y a Katsumoto, K a Kimoto, T a Matsunami, H a

a KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; GRAPHITE; HALL EFFECT; HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; PHOSPHORUS; POSITIVE IONS; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

DONOR CONCENTRATION; IMPLANTATION-INDUCED DEFECTS; SHEET RESISTANCE; TEMPERATURE DEPENDENCE;

SILICON CARBIDE;

EID: 3142675183 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1756213 Document Type: Article

Times cited : (169)

References (14)

1
- 0031206903
- H. Matsunami and T. Kimoto, Mater. Sci. Eng., R. 20, 125 (1997).
- (1997) Mater. Sci. Eng., R , vol.20 , pp. 125
- Matsunami, H.¹ Kimoto, T.²

2
- 0042911006
- University of South Carolina Press, Columbia, S. C.
- Yu A. Vodakov and E. N. Mokhov, Silicon Carbide 1973 (University of South Carolina Press, Columbia, S. C., 1974), p. 508.
- (1973) Silicon Carbide , pp. 508
- Vodakov, Yu.A.¹ Mokhov, E.N.²

3
- 0036607417
- F. Schmid, M. Laube, G. Pensl, G. Wagner, and M. Maier, J. Appl. Phys. 91, 9182 (2002).
- (2002) J. Appl. Phys. , vol.91 , pp. 9182
- Schmid, F.¹ Laube, M.² Pensl, G.³ Wagner, G.⁴ Maier, M.⁵

4
- 0000840811
- J. A. Gardner, A. Edwards, M. V. Rao, N. Papanicolaou, G. Keiner, O. W. Holland, M. A. Capano, M. Ghezzo, and J. Kretchmer, J. Appl. Phys. 83, 5118 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 5118
- Gardner, J.A.¹ Edwards, A.² Rao, M.V.³ Papanicolaou, N.⁴ Keiner, G.⁵ Holland, O.W.⁶ Capano, M.A.⁷ Ghezzo, M.⁸ Kretchmer, J.⁹

5
- 0036640013
- M. Laube, F. Schmid, G. Pensl, G. Wagner, M. Linnarsson, and M. Maier, J. Appl. Phys. 92, 549 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 549
- Laube, M.¹ Schmid, F.² Pensl, G.³ Wagner, G.⁴ Linnarsson, M.⁵ Maier, M.⁶

6
- 0033871855
- M. A. Capano, R. Santhakumar, R. Venugopal, M. R. Melloch, and J. A. Cooper, Jr., J. Electron. Mater. 29, 210 (2000).
- (2000) J. Electron. Mater. , vol.29 , pp. 210
- Capano, M.A.¹ Santhakumar, R.² Venugopal, R.³ Melloch, M.R.⁴ Cooper Jr., J.A.⁵

7
- 0032634979
- M. A. Capano, S. Ryu, J. A. Cooper, Jr., M. R. Melloch, K. Rottner, S. Karlsson, N. Nordell, A. Powell, and D. E. Walker, Jr., J. Electron. Mater. 28, 214 (1999).
- (1999) J. Electron. Mater. , vol.28 , pp. 214
- Capano, M.A.¹ Ryu, S.² Cooper Jr., J.A.³ Melloch, M.R.⁴ Rottner, K.⁵ Karlsson, S.⁶ Nordell, N.⁷ Powell, A.⁸ Walker Jr., D.E.⁹

8
- 0000467093
- S. E. Saddow, J. Williams, T. Isaacs-Smith, M. A. Capano, J. A. Cooper, Jr., M. S. Mazzola, A. J. Hsieh, and J. B. Casady, Mater. Sci. Forum 338-342, 901 (2000).
- (2000) Mater. Sci. Forum , vol.338-342 , pp. 901
- Saddow, S.E.¹ Williams, J.² Isaacs-Smith, T.³ Capano, M.A.⁴ Cooper Jr., J.A.⁵ Mazzola, M.S.⁶ Hsieh, A.J.⁷ Casady, J.B.⁸

9
- 0032634927
- K. A. Jones, P. B. Shah, K. W. Kirchner, R. T. Lareau, M. C. Wood, M. H. Ervin, R. D. Vispute, R. P. Sharma, T. Venkatesan, and O. W. Holland, Mater. Sci. Eng., B 61-62, 281 (1999).
- (1999) Mater. Sci. Eng., B , vol.61-62 , pp. 281
- Jones, K.A.¹ Shah, P.B.² Kirchner, K.W.³ Lareau, R.T.⁴ Wood, M.C.⁵ Ervin, M.H.⁶ Vispute, R.D.⁷ Sharma, R.P.⁸ Venkatesan, T.⁹ Holland, O.W.¹⁰

10
- 0036429052
- J. Senzaki, S. Harada, R. Kosugi, S. Suzuki, K. Fukuda, and K. Arai, Mater. Sci. Forum 389-393, 795 (2002).
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 795
- Senzaki, J.¹ Harada, S.² Kosugi, R.³ Suzuki, S.⁴ Fukuda, K.⁵ Arai, K.⁶

11
- 0036431160
- H. Nakamura, H. Watanabe, J. Yamazaki, N. Tanaka, and R. K. Malhan, Mater. Sci. Forum 389-393, 807 (2002).
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 807
- Nakamura, H.¹ Watanabe, H.² Yamazaki, J.³ Tanaka, N.⁴ Malhan, R.K.⁵

12
- 0000595428
- W. M. Chen, N. T. Son, C. Persson, U. Lindefeit, O. Kordina, E. Sörman, A. O. Konstantinov, B. Monemar, and E. Janzén, Phys. Rev. B 53, 15409 (1996).
- (1996) Phys. Rev. B , vol.53 , pp. 15409
- Chen, W.M.¹ Son, N.T.² Persson, C.³ Lindefeit, U.⁴ Kordina, O.⁵ Sörman, E.⁶ Konstantinov, A.O.⁷ Monemar, B.⁸ Janzén, E.⁹

13
- 0001658615
- Yu. A. Vodakov, E. N. Mokhov, M. G. Ramm, and A. D. Roenkov, Springer Proc. Phys. 56, 329 (1992).
- (1992) Springer Proc. Phys. , vol.56 , pp. 329
- Vodakov, Yu.A.¹ Mokhov, E.N.² Ramm, M.G.³ Roenkov, A.D.⁴

14
- 79956017482
- Y. Negoro, N. Miyamoto, T. Kimoto, and H. Matsunami, Appl. Phys. Lett. 80, 240 (2002).
- (2002) Appl. Phys. Lett. , vol.80 , pp. 240
- Negoro, Y.¹ Miyamoto, N.² Kimoto, T.³ Matsunami, H.⁴

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