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Volumn 19, Issue 6, 2004, Pages 1818-1825

Quantifying improvements in adhesion of platinum films on brittle substrates

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BRITTLENESS; COMPOSITION EFFECTS; DEPOSITION; FILMS; FRACTURE; INDENTATION; INTERFACIAL ENERGY; SILICA; SUBSTRATES; TITANIUM; TUNGSTEN;

EID: 3142672118     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2004.0232     Document Type: Article
Times cited : (14)

References (37)
  • 2
    • 3142730351 scopus 로고    scopus 로고
    • Interfacial and nanoscale failure, nanoindentation methods for interfacial fracture testing
    • edited by W.W. Gerberich, W. Yang, I. Milne, R.O. Ritchie, and B. Karihaloo, editors-in-chief, Elsevier, Amsterdam
    • A.A. Volinsky, D.F. Bahr, M. Kriese, N.R. Moody, and W.W. Gerberich: Interfacial and Nanoscale Failure, Nanoindentation Methods For Interfacial Fracture Testing, in Encyclopedia on Comprehensive Structural Integrity, Vol. 8, edited by W.W. Gerberich, W. Yang, I. Milne, R.O. Ritchie, and B. Karihaloo, editors-in-chief (Elsevier, Amsterdam, 2003).
    • (2003) Encyclopedia on Comprehensive Structural Integrity , vol.8
    • Volinsky, A.A.1    Bahr, D.F.2    Kriese, M.3    Moody, N.R.4    Gerberich, W.W.5
  • 3
    • 0037039675 scopus 로고    scopus 로고
    • Interfacial toughness measurements from thin films on substrates
    • A.A. Volinsky, N.R. Moody, and W.W. Gerberich: Interfacial toughness measurements from thin films on substrates. Acta Mater. 50, 441 (2002).
    • (2002) Acta Mater. , vol.50 , pp. 441
    • Volinsky, A.A.1    Moody, N.R.2    Gerberich, W.W.3
  • 4
    • 0024127780 scopus 로고
    • A review of the methods for the measurement of coating-substrate adhesion
    • D.S. Rickerby: A review of the methods for the measurement of coating-substrate adhesion. Surf. Coat. Technol. 36, 541 (1988).
    • (1988) Surf. Coat. Technol. , vol.36 , pp. 541
    • Rickerby, D.S.1
  • 5
    • 0032148081 scopus 로고    scopus 로고
    • An analysis of spalling in the microscratch test
    • M.D. Thouless: An analysis of spalling in the microscratch test. Eng. Fract. Mech. 61, 75 (1998).
    • (1998) Eng. Fract. Mech. , vol.61 , pp. 75
    • Thouless, M.D.1
  • 6
    • 0030401463 scopus 로고    scopus 로고
    • Continuous microscratch measurements of the practical and true works of adhesion for metal/ceramic systems
    • S. Venkataraman, D.L. Kohlstedt, and W.W. Gerberich: Continuous microscratch measurements of the practical and true works of adhesion for metal/ceramic systems. J. Mater. Res. 11, 3133 (1996).
    • (1996) J. Mater. Res. , vol.11 , pp. 3133
    • Venkataraman, S.1    Kohlstedt, D.L.2    Gerberich, W.W.3
  • 7
    • 0026106027 scopus 로고
    • Microscratch and load relaxation tests for ultra-thin films
    • T.W. Wu: Microscratch and load relaxation tests for ultra-thin films. J. Mater. Res. 6, 407 (1991).
    • (1991) J. Mater. Res. , vol.6 , pp. 407
    • Wu, T.W.1
  • 8
    • 0032635756 scopus 로고    scopus 로고
    • Quantaitative adhesion measures of multilayer films: Part I. Indentation mechanics
    • M.D. Kriese, N.R. Moody, and W.W. Gerberich: Quantaitative adhesion measures of multilayer films: Part I. Indentation mechanics. J. Mater. Res. 14, 3007 (1999).
    • (1999) J. Mater. Res. , vol.14 , pp. 3007
    • Kriese, M.D.1    Moody, N.R.2    Gerberich, W.W.3
  • 9
    • 0021522097 scopus 로고
    • Measurement of adherence of residually stressed thin films by indentation I. Mechanics of interface delamination
    • D.B. Marshall and A.G. Evans: Measurement of adherence of residually stressed thin films by indentation I. Mechanics of interface delamination. J. Appl. Phys. 10, 2632 (1984).
    • (1984) J. Appl. Phys. , vol.10 , pp. 2632
    • Marshall, D.B.1    Evans, A.G.2
  • 10
    • 0030212521 scopus 로고    scopus 로고
    • Microwedge indentation of the thin film fine line-1. Mechanics
    • M.P. DeBoer and W.W. Gerberich: Microwedge indentation of the thin film fine line-1. Mechanics. Acta. Mater. 44, 3169 (1996).
    • (1996) Acta. Mater. , vol.44 , pp. 3169
    • DeBoer, M.P.1    Gerberich, W.W.2
  • 11
    • 0032662620 scopus 로고    scopus 로고
    • Quantaitative adhesion measures of multilayer films: Part II. Indentation of W/Cu, W/W, Cr/W
    • M.D. Kriese, N.R. Moody, and W.W. Gerberich: Quantaitative adhesion measures of multilayer films: Part II. Indentation of W/Cu, W/W, Cr/W J. Mater. Res. 14, 3019 (1999).
    • (1999) J. Mater. Res. , vol.14 , pp. 3019
    • Kriese, M.D.1    Moody, N.R.2    Gerberich, W.W.3
  • 12
    • 0001357148 scopus 로고
    • Use of microindentation technique for determining interfacial fracture energy
    • L.G. Rosenfeld, J.E. Ritter, T.J. Lardner, and M.R. Lin: Use of microindentation technique for determining interfacial fracture energy. J. Appl. Phys. 67, 3291 (1990).
    • (1990) J. Appl. Phys. , vol.67 , pp. 3291
    • Rosenfeld, L.G.1    Ritter, J.E.2    Lardner, T.J.3    Lin, M.R.4
  • 13
    • 0032148208 scopus 로고    scopus 로고
    • Adhesion and debonding of multilayer thin film structures
    • R.H. Dauskardt, M. Lane, Q. Ma, and N. Krishna: Adhesion and debonding of multilayer thin film structures. Eng. Fract. Mech. 61, 141 (1998).
    • (1998) Eng. Fract. Mech. , vol.61 , pp. 141
    • Dauskardt, R.H.1    Lane, M.2    Ma, Q.3    Krishna, N.4
  • 14
    • 0028468445 scopus 로고
    • A new procedure for measuring the decohesion energy for thin ductile films on substrates
    • A. Bagchi, G.E. Lucas, Z. Suo, and A.G. Evans: A new procedure for measuring the decohesion energy for thin ductile films on substrates. J. Mater. Res. 9, 1734 (1994).
    • (1994) J. Mater. Res. , vol.9 , pp. 1734
    • Bagchi, A.1    Lucas, G.E.2    Suo, Z.3    Evans, A.G.4
  • 15
    • 0030231959 scopus 로고    scopus 로고
    • Measurements of the debond energy for thin metallization lines on dielectrics
    • A. Bagchi and A.G. Evans: Measurements of the debond energy for thin metallization lines on dielectrics. Thin Solid Films 286, 230 (1996).
    • (1996) Thin Solid Films , vol.286 , pp. 230
    • Bagchi, A.1    Evans, A.G.2
  • 18
    • 3142689408 scopus 로고    scopus 로고
    • edited by R. Vinci, O. Kraft, N. Moody, P. Besser, and E. Shaffer II. Mater. Res. Soc. Symp. Proc. 594, Warrendale, PA
    • A.A. Volinsky, N.R. Moody, and W.W. Gerberich, in Thin Films - Stresses and Mechanical Properties VII, edited by R. Vinci, O. Kraft, N. Moody, P. Besser, and E. Shaffer II. (Mater. Res. Soc. Symp. Proc. 594, Warrendale, PA, 2000), p. 383.
    • (2000) Thin Films - Stresses and Mechanical Properties VII , pp. 383
    • Volinsky, A.A.1    Moody, N.R.2    Gerberich, W.W.3
  • 19
    • 0031634621 scopus 로고    scopus 로고
    • edited by R.C. Cammarata, M.A. Nastasi, E.P. Busso, and W.C. Oliver Mater. Res. Soc. Symp. Proc. 505, Warrendale, PA
    • M.D. Kriese, N.R. Moody, and W.W. Gerberich, in Thin-Films-Stresses and Mechanical Properties VII, edited by R.C. Cammarata, M.A. Nastasi, E.P. Busso, and W.C. Oliver (Mater. Res. Soc. Symp. Proc. 505, Warrendale, PA, 1998), p. 363.
    • (1998) Thin-Films-Stresses and Mechanical Properties VII , pp. 363
    • Kriese, M.D.1    Moody, N.R.2    Gerberich, W.W.3
  • 21
    • 0032070983 scopus 로고    scopus 로고
    • Effects of morphology on the decohesion of compressed thin films
    • M.Y. He, A.G. Evans, and J.W. Hutchinson: Effects of morphology on the decohesion of compressed thin films. Mater. Sci. Eng. A245, 168 (1998).
    • (1998) Mater. Sci. Eng. , vol.A245 , pp. 168
    • He, M.Y.1    Evans, A.G.2    Hutchinson, J.W.3
  • 23
    • 0033340678 scopus 로고    scopus 로고
    • Interface adhesion: Effects of plasticity and segregation
    • A.G. Evans, J.W. Hutchinson, and Y. Wei: Interface adhesion: Effects of plasticity and segregation. Acta Mater. 47, 4093 (1999).
    • (1999) Acta Mater. , vol.47 , pp. 4093
    • Evans, A.G.1    Hutchinson, J.W.2    Wei, Y.3
  • 24
    • 0032626196 scopus 로고    scopus 로고
    • Substrate composition effects of the interfacial fracture of tantalum nitride films
    • N.R. Moody, A. Strojny, D.L. Medlin, A. Talin, and W.W. Gerberich: Substrate composition effects of the interfacial fracture of tantalum nitride films. J. Mater. Res. 14, 2306 (1999).
    • (1999) J. Mater. Res. , vol.14 , pp. 2306
    • Moody, N.R.1    Strojny, A.2    Medlin, D.L.3    Talin, A.4    Gerberich, W.W.5
  • 26
    • 0034253505 scopus 로고    scopus 로고
    • Chromium interlayers as a tool for enhancing diamond adhesion on copper
    • N. Ali, W. Ahmed, C.A. Rego, and Q.H. Fan: Chromium interlayers as a tool for enhancing diamond adhesion on copper. Diamond Relat. Mater. 9, 1464 (2000).
    • (2000) Diamond Relat. Mater. , vol.9 , pp. 1464
    • Ali, N.1    Ahmed, W.2    Rego, C.A.3    Fan, Q.H.4
  • 27
    • 0031623579 scopus 로고    scopus 로고
    • Processing and characterization of piezoelectric Materials and integration into microelectromechanical systems
    • D.L. Polla and L.F. Francis: Processing and characterization of piezoelectric Materials and integration into microelectromechanical systems. Ann. Rev. Mater. Sci. 28, 563 (1998).
    • (1998) Ann. Rev. Mater. Sci. , vol.28 , pp. 563
    • Polla, D.L.1    Francis, L.F.2
  • 28
    • 0033682798 scopus 로고    scopus 로고
    • Ferroelectric thin films for micro-sensors and actuators: A review
    • P. Muralt: Ferroelectric thin films for micro-sensors and actuators: A review. J. Micromech. Microeng. 10, 136 (2000).
    • (2000) J. Micromech. Microeng. , vol.10 , pp. 136
    • Muralt, P.1
  • 32
    • 0025421834 scopus 로고
    • Interface crack between two elastic layers
    • Z. Suo and J.W. Hutchinson: Interface crack between two elastic layers. Int. J. Fracture 43, 1 (1990).
    • (1990) Int. J. Fracture , vol.43 , pp. 1
    • Suo, Z.1    Hutchinson, J.W.2
  • 34
    • 0037009740 scopus 로고    scopus 로고
    • Indentation deformation and fracture of thin polystyrene films
    • M. Li, M.L. Palacio, C.B. Carter, and W.W. Gerberich: Indentation deformation and fracture of thin polystyrene films. Thin Solid Films 416, 174 (2002).
    • (2002) Thin Solid Films , vol.416 , pp. 174
    • Li, M.1    Palacio, M.L.2    Carter, C.B.3    Gerberich, W.W.4
  • 35
    • 0042968801 scopus 로고    scopus 로고
    • edited by A. Kumar, W.J. Meng, Y-T. Cheng, J.S. Zabinski, G.L. Doll, and S. Veprek, Mater. Res. Soc. Symp. Proc. 750, Warrendale, PA
    • M.J. Cordill, N.R. Moody, and D.F. Bahr, in Surface Engineering 2002 - Synthesis, Characterization and Applications, edited by A. Kumar, W.J. Meng, Y-T. Cheng, J.S. Zabinski, G.L. Doll, and S. Veprek (Mater. Res. Soc. Symp. Proc. 750, Warrendale, PA, 2003),pp. 33-38
    • (2003) Surface Engineering 2002 - Synthesis, Characterization and Applications , pp. 33-38
    • Cordill, M.J.1    Moody, N.R.2    Bahr, D.F.3
  • 36
    • 0034582833 scopus 로고    scopus 로고
    • Plasticity contributions to interface adhesion in thin film interconnect structures
    • M. Lane, R.H. Dauskardt, A. Vainchtein, and H. Gao: Plasticity contributions to interface adhesion in thin film interconnect structures. J. Mater. Res. 15, 2758 (2000).
    • (2000) J. Mater. Res. , vol.15 , pp. 2758
    • Lane, M.1    Dauskardt, R.H.2    Vainchtein, A.3    Gao, H.4
  • 37
    • 0036833225 scopus 로고    scopus 로고
    • An experimental study of the influence of imperfections on the buckling of compressed thin films
    • M.W. Moon, H.M. Jensen, J.W. Hutchinson, K.H. Oh, and A.G. Evans: An experimental study of the influence of imperfections on the buckling of compressed thin films. J. Mech Phys Solids. 50, 2355 (2002).
    • (2002) J. Mech Phys Solids. , vol.50 , pp. 2355
    • Moon, M.W.1    Jensen, H.M.2    Hutchinson, J.W.3    Oh, K.H.4    Evans, A.G.5


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