Bulk silicon micro-machined MEM switches for millimeter-wave applications

2001 31st European Microwave Conference, EuMC 2001

Volumn , Issue , 2001, Pages

  Grenier, K ^a,b   Pons, P ^a   Plana, R ^a,b   Graffeuil, J ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

BULK SILICON; ELECTROMAGNETIC SIMULATION; FURTHER DEVELOPMENT; MICRO-ELECTRO-MECHANICAL; MICRO-MACHINED; MILLIMETER-WAVE APPLICATIONS; SILICON SUBSTRATES;

MILLIMETER WAVES;

EID: 84897488234     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.2001.339132     Document Type: Conference Paper

References (7)

1. Z. Yao and al.: "Micromachined low-loss microwave switches". IEEE Journal of MEMS, vol. 8, no 2, June 1999, pp. 129-134
2. E. Brown: "RF-MEMS switches for reconfigurable integrated circuits". IEEE MTT, vol. 46, no 11, November 1998, pp. 1868-1880
3. C. Goldsmith and al.: "Characteristics of micromachined switches at microwave frequencies". IEEE MTT-S Digest, 1996, pp. 1141-1144
4. J. Muldavin, G. Rebeiz "High isolation CPW MEMS shunt switches-Part 1: Modeling". IEEE MTT, vol. 48, no 6, June 2000, pp. 1045-1052
5. K. Grenier, P. Pons, T. Parra, R. Plana, J. Graffeull "Silicon microelectromechanical systems for millimeterwave applications". Proc of DTIP of MEMS and MOEMS, Paris, France, May 2000, pp. 354-361
6. K. Grenier and al.: "Silicon MEM Technology for Millimeter-Wave Applications". Proc of Microelectronic and MEMS Technologies, Edinburgh, UK, May 2001
7. N. Barker, G. Rebeiz: "Distributed MEMS true-time delay phase shifters and wide-band switches". IEEE MTT, vol. 46, no 11, November 1998, pp. 1881-1889